JPS63200748U - - Google Patents

Info

Publication number
JPS63200748U
JPS63200748U JP9299987U JP9299987U JPS63200748U JP S63200748 U JPS63200748 U JP S63200748U JP 9299987 U JP9299987 U JP 9299987U JP 9299987 U JP9299987 U JP 9299987U JP S63200748 U JPS63200748 U JP S63200748U
Authority
JP
Japan
Prior art keywords
valve
gas chamber
differential pressure
piston
semipermeable membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9299987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9299987U priority Critical patent/JPS63200748U/ja
Publication of JPS63200748U publication Critical patent/JPS63200748U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP9299987U 1987-06-17 1987-06-17 Pending JPS63200748U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9299987U JPS63200748U (en]) 1987-06-17 1987-06-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9299987U JPS63200748U (en]) 1987-06-17 1987-06-17

Publications (1)

Publication Number Publication Date
JPS63200748U true JPS63200748U (en]) 1988-12-23

Family

ID=30955200

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9299987U Pending JPS63200748U (en]) 1987-06-17 1987-06-17

Country Status (1)

Country Link
JP (1) JPS63200748U (en])

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